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Specification of Wet Chemical Processing Station
1.? ?? ???In – Organic Wet Chemical Station ( Quantity 01 )
1.1? ?? ???General Specifications :
1.1.1? ?? ???Overall dimension : 1800 mm (L) x 800 mm (D) x 1700 mm (H) ± 100 mm.
1.1.2? ?? ?? ?Suitable for Inorganic Chemicals like HF, HCL,H2O2, H2SO4, NH4OH, KOH, TMAH, HNO3 ( vendor to specify ).
1.1.3? ?? ?? ?Full seamed welded min 12 mm thick White Polypropylene housing with Teflon perforated work top, ISO Certified Housing.
1.1.4? ?? ?? ?Min 5 ~ 6 thick Clear Lexan vertical sliding / flapping sash panels.
1.1.5? ?? ???Slopped plenum bottom for complete drainage
1.1.6? ?? ?? ?Bypass opening top and bottom sliding doors for reducing chemical vapour concentration.
1.1.7? ?? ???Wet Station with Acid Fume Resistant coated exhaust system with exhaust capacity 1100 CFM.
1.2? ?? ???Features :
1.2.1? ?? ???One inbuilt “ Quartz with Teflon / PTFE isostatically moulded ” acid bath ( for Fuming HNO3 ) with heater, temperature control and cover.??The bath should accommodate 6” Wafer cassette ( typical ) dimension 200 mm (L) x 200 mm (W) x 250 mm (D) upto 200°C.
1.2.2? ?? ?? ?One inbuilt Teflon / PTFE acid bath with cover, without heater facility.??Typical dimension 200 mm (L) x 200 mm (W) x 175 – 230 mm (D).
1.2.3? ?? ?? ?PVC adjustable leg levelers with lock and PU Wheels.
1.2.4? ?? ?? ?Sealed light fixture with light source for proper illumination at deck level.
1.2.5? ?? ???Exhausted lower compartment for chemical storage i.e. beneath deck, including PP silding door.
1.2.6? ?? ?? ?Class 1000 clean room compatible.
1.2.7? ?? ???Suitable exhaust meter should be provided.
1.3? ?? ???Power & Utilities :
1.3.1? ?? ???Electrical utility : 220V AC, ± 5%, 50 Hz, Single phase with EMO switch cut-off all electrical power to chemical station.
1.3.2? ?? ?? ?Three electrical sockets ( 5 Amps / 16 Amps ) 1 Switch for fluorescent light has to be provided ( Compatible for Indian Standard Electrical Connection ).
1.4? ?? ???Utility Sink :
1.4.1? ?? ???One perforated cover sink of size 440 mm (L) x 320 mm ( W ) x 250 mm (D ) ± 50 mm at the extreme right or left side of work deck PVDF / Teflon to work surface.
1.4.2? ?? ?? ?Proper acid drainage system for the Wet Bench ( Vendor to Specify ).
1.4.3? ?? ?? ?PVC gooseneck x 2 Nos. – mounted adjacent to basin, Tap and RO Water.
1.4.4? ?? ?? ?PFA Spray Gun x 1 No. – hook on the side wall ( basin ) DI Water
1.4.5? ?? ?? ?PFA Spray Gun x 1 No. – hook on the side wall ( basin ) – N2